Capacitance study of integrated circuits matrix interconnects

Capacitance variability of short range interconnects

End of the roadmap integrated circuit interconnects suffer from capacitance variability due to line edge roughness (LER), significantly impacting overall circuit performance. We forecast the capacitance variability of short range interconnects with realistic line edge roughness at the upcoming 45, 32, and 22 nm technology nodes using a fast TCAD capacitance tool. Capacitance variability is layo...

Integrated Capacitance Bridge An integrated capacitance bridge for high-resolution, wide temperature range quantum capacitance measurements

An integrated capacitance bridge for high-resolution, wide temperature range quantum capacitance measurements Arash Hazeghi, 2 Joseph A. Sulpizio, 3 Georgi Diankov, David Goldhaber-Gordon, a) and H.S. Philip Wong These authors contributed equally to this work Department of Electrical Engineering, Stanford University Department of Physics, Stanford University Department of Chemistry, Stanford Un...

Capacitance Matrix Preconditioning

Interconnects and Packaging of Millimeter Wave Circuits

This contribution presents a number of aspects relevant for interconnects and packaging of monolithic integrated circuits, possibly combined with hybrid or even waveguide circuits in the millimeter-wave range. Examples of different interconnects and two realized front-ends are demonstrated.

Characterization and modeling of pattern dependencies in copper interconnects for integrated circuits